ESASHI Masayoshi Professor

Basic DetailShort BiographyPrincipal achievementResearchLessonMessage

ESASHI Masayoshi Professor

Research Cluster:Fusion Region, 

Major Field
Tools for brain research have been developed and supplied. These are fabricated using semiconductor technology called MEMS (Micro Electro Mechanical Systems).

Related web pages

Basic Detail




The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR)



Methods &

半導体微細加工技術でセンサや電極などを製作するMEMS(Micro Electro Mechanucal Systems)を用い、脳科学研究のツールを提供する。


仙台市青葉区荒巻字青葉519-1176 西澤潤一記念研究センター




esashi [@]

Affiliation Society


move top

Short Biography

Masayoshi Esashi received the B.E. degree in electronic engineering in 1971 and the Doctor of Engineering degree in 1976 at Tohoku University. He served as a research associate from 1976 and an associate professor from 1981 in Tohoku University. Since 1990 he has been a professor and he is now in The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR). He serves as the director of Micro System Integration Center (μSIC) in Tohoku University. He has been studying microsensors. He was awaeded Purple ribbon award (2006) etc.

move top

Principal achievement

M.Esashi : Wafer Level Packaging of MEMS, J. of Micromechanics and Microengineering, 18 (2008) 073001(13pp)

Y.Haga and M.Esashi : Biomedical Microsystems for Minimally Invasive Diagnosis and Treatment, Proc. of the IEEE, 92, 1 (2004), 98-114

C.Y.Shao, Y.Kawai, M.Esashi and T.Ono : Electrostatic Actuator Probe with Curved Electrodes for Time-of-flight Scanning Force Microscopy, Review of Scientific Instruments, 81 (2010) 083702

move top


MEMS (Micro Electro Mechanical Systems) are technologies in which the microfabrication techniques for semiconductor integrated circuits are applied to the preparation of small high-performance components (e.g., sensors) that are essential to the systems they comprise. We have been conducting research on MEMS for approximately 40 years, and through numerous developments, have carried out product commercialization as well. Among these products are electrodes for deriving neuronal impulses from the brain and cathethers that monitor blood hydrogen ion concentration or carbon-dioxide partial pressure within blood vessels.

I cherish “manufacturing” prototypes. For this we use highly maneuverable experimental equipment consisting mainly of custom-made devices that are shared among many laboratories. The research we conduct with this equipment is largely grouped into minimally invasive diagnosis and treatment tools with functionalized catheter tips, and microprobes that use thin and narrow beams of silicone. One example of the former is an ultrafine blood pressure guage with a diameter of 125 μm, approximately the size of human hair, in which the blood pressure-induced bending of a movable diaphragm formed on the end plane of a fiber is detected as a change in the optical interferernce spectrum. The second is a catheter-on the tip of which a reciever coil for magnetic resonance imaging (MRI) is formed-which can obtain high resolution images near the catheter tip. An example of the latter is a microprobe for a magnetic resonance force microscope (MRFM). Use of this probe, which consists of a 50-nm thin silicon cantilever beam with a small magnet attached to the end, may enable MRI imaging of small targets such as cells. A second example of the latter is a microprobe for a time-of-flight scanning force microscope-a scanning electron microscope that can sample and introduce molecules into a time-of-flight mass analysis device. These technologies, which yield high sensitivity, spatial resolution, and high performance owing to miniaturization, will provide effective tools for brain research.

Experimental equipment consisting mainly of custom-made devices



move top


It will be current in organizing information

move top


To Undergraduate

To High school student

move top